DIPOLE RING MAGNET ASSISTED MICROWAVE RADIAL LINE SLOT ... The invention relates to plasma processing with microwave (MW) plasmas, particularly surface wave plasmas (SWP), for example as produced with a Radial Line Slot Antenna, and more particularly, to a method and apparatus providing relatively low electron energies and plasma uniformity near a treated substrate. BACKGROUND OF THE INVENTION Control of Phase in Radial Line Slot Antenna for 5G ... design all the system, including the antenna and, therefore, its radiant element. One family of antennas that is suitable for being applied in this issue is the radial line slot antenna (RLSA). These antennas have been widely studied since 1980 for satellite applications, plasma or RADAR systems [1-3]. TEL Announces Release of New Plasma Nitridation System ...
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US7276990B2 - Single-pole multi-throw switch having low… No. 6,252,473 issued Jun. 26, 2001 and assigned to Hughes Electronics Corporation. This patent describes a waveguide switch using bulk mechanical actuators. USRE43699E1 - Reconfigurable scanner and RFID system using the… Specifically, the release of electromagnetic antenna signals from antenna 400 depends upon the annular plasma shield 420 being positioned at either one wavelength or greater from the antenna 400, or at distances equal to the wavenumber … US4185213A - Gaseous electrode for MHD generator - Google… The plasma plume is injected into the MHD generator's main channel thereby forming a gaseous electrode. The electrode is oriented in the main channel opposed by at least a second electrode which may be of the same or a different …
FIELD OF THE INVENTION. The invention relates to plasma processing with microwave (MW) plasmas, particularly surface wave plasmas (SWP), for example as produced with a radial line slot antenna, and more particularly, to a method and apparatus providing relatively low electron temperature and plasma uniformity
Characteristics of large-diameter plasma using a radial ...
US Patent for Plasma processing apparatus and plasma ...
of 2mm from the slot and two pictures of typical plasma optical emission patterns of hydrogen plasmas. Microwaves were radiated in the transverse direction with respect to the annularity of the slot antenna. The plasmas were generated below the annular slot antenna and the regions of intense plasma optical emissions were propagated along the quartz
RLSA microwave plasma processing apparatus, a number of slots planar antenna is formed in a predetermined pattern on the top of the chamber (Radial Line Slot Antenna) is provided, the microwaves guided from the microwave generating source...
An anti-fading antenna (informally and often incorrectly termed a "Franklin" antenna) is a long- and medium-wave transmission antenna with a flat vertical radiation pattern. Commision B 93 Three-dimensional scattering problems have been numerically studied by using several methods such as the boundary element method [Toyoda et al.,1990], the generalized multipole technique [Tsuji et al., 1991; Ikuno et al, 1989,1991], the …
A thruster has a main chamber (6) defining an axis (4) of thrust. The thruster has means adapted to provide ionizable propellant within the main chamber (6) and an ionizer (124) adapted to ionize the injected gas within the main chamber (6 … US8982011B1 - Conformal antennas for mitigation of structural… FIG. 3 a illustrates conceptually the method the invention uses to mitigate the antenna blockage problem discussed with reference to FIG. 1 a. The antenna originally used on the aircraft 1 is replaced with a Artificial Impedance Surface … Broadband Metamaterials in Electromagnetics | Metamaterial…